Issue 5


  • Volume: 47
  • Issue number: 5

Table of contents

Title Author(s) Pages
Implementation of a Two-Qubit C-NOT Quantum Gate in a System of Two Double Quantum Dots, a Microcavity, and a Laser V. G. Chekmachev / A. V. Tsukanov Pages 3-13
Analytic Model of Transit-Time Diodes and Transistors for the Generation and Detection of THz Radiation V. V. Vyurkov / K. V. Rudenko / M. K. Rudenko / I. A. Semenikhin / A. B. Nemtsov / R. R. Khabutdinov / V. F. Lukichev Pages 14-21
Investigation of a Capacitor Array of a Composite Capacitive Touch Panel D. S. Terent’ev / V. A. Shakhnov / A. I. Vlasov / A. I. Krivoshein Pages 22-29
Investigation of Characteristics of Electrostatically Actuated MEMS Switch with an Active Contact Breaking Mechanism I. V. Uvarov / A. N. Kupriyanov Pages 30-37
Reliability Investigation of 0.18-μm SOI MOS Transistors at High Temperatures A. S. Benediktov / A. G. Potupchik / A. A. Mikhailov / P. V. Ignatov Pages 38-43
Investigation of the Process of Plasma Through Etching of HkMG Stack of Nanotransistor with a 32-nm Critical Dimension A. V. Myakonkikh / K. Yu. Kuvaev / A. A. Tatarintsev / N. A. Orlikovskii / K. V. Rudenko / O. P. Guschin / E. S. Gornev Pages 44-50
Applications of the Technology of Fast Neutral Particle Beams in Micro- and Nanoelectronics V. P. Kudrya / Yu. P. Maishev Pages 51-63
The Model of the Process of the Chemical Mechanical Polishing of the Copper Metallization, Based on the Formation of the Passivation Layer M. E. Sarychev / T. M. Makhviladze Pages 64-73
Nanosecond-Pulse Annealing of Heavily Doped Ge:Sb Layers on Ge Substrates R. I. Batalov / R. M. Bayazitov / H. A. Novikov / I. A. Faizrakhmanov / V. A. Shustov / G. D. Ivlev Pages 74-82

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