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Investigation of Characteristics of Electrostatically Actuated MEMS Switch with an Active Contact Breaking Mechanism
 
PIIS054412690001734-4-1
DOI10.31857/S054412690001734-4
Publication type Article
Status Published
Authors
I. V. Uvarov 
Affiliation: Yaroslavl Branch of the Physics and Technology Institute of the Russian Academy of Sciences
Address: Russian Federation
A. N. Kupriyanov
Affiliation: Yaroslavl Branch of the Physics and Technology Institute of the Russian Academy of Sciences
Address: Russian Federation
Journal nameMikroelektronika
EditionVolume 47 5
Pages30-37
Abstract

    

Keywords
Publication date28.10.2018
Number of characters822
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