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1. Pokhlebkin D. MEMS v strukture ehlektronnoj otrasli Rossii [Ehlektronnyj resurs] // Semicon Russia 2014, May 14–15 Moscow. URL: http://docplayer.ru/28554959-Frost-sullivan-mems-vstrukture-elektronnoy-otrasli-rossii-dmitriypohlebkin-frost-sullivan.html (data obrascheniya: 30.03.2018).
2. Zhang W.-M., Yan H., Peng Z.-K., Meng G. Electrostatic pull-in instability in MEMS/NEMS: A review // Sensors and Actuators A: Physical. 2014. V. 214. P. 187–218. doi.org/10.1016/j.sna. 2014.04.025.
3. Dragunov V.P., Ostertak D. I. Analiz ehlektromekhanicheskikh protsessov v MEhM P s izmenyayuschejsya ploschad'yu perekrytiya ehlektrodov // Nauchnyj vestnik NGTU. 2009. № 2 (35). S . 115–127.
4. Dragunov V.P., Ostertak D. I. Vzaimosvyaz' ehlektromekhanicheskikh parametrov MEhMP mostovogo tipa // Doklady Akademii nauk vysshej shkoly Rossijskoj Federatsii. 2009. № 1 (12). S. 88–98.
5. Dragunov V.P., Ostertak D. I. Predel'nye kharakteristiki mikroehlektromekhanicheskikh preobrazovatelej ehnergii // Nauchnyj vestnik NGTU. 2009. № 1 (34). S. 129–142.
6. Dorzhiev V., Dragunov V., Karami A., Galayko D., Basset P. MEMS electrostatic vibration energy harvester without switches and inductive elements // Journal of Physics: Conference Series. 2014. T. 557. № 1. S. 012126
7. Ostertak D. I. Analiz ehlektrostaticheskikh vzaimodejstvij v ploskoparallel'nykh MEhMS s uchetom kraevykh ehffektov v 3D-priblizhenii // Doklady Akademii nauk vysshej shkoly Rossijskoj Federatsii. 2017. № 1 (34). S. 116–132. doi: 10.17212/1727-2769-2017-1-116-132.
8. Blum K.E., Ostertak D. I. Raschet emkosti grebenchatogo peremennogo kondensatora dlya ehlektrostaticheskogo vibratsionnogo generatora ehnergii s uchetom kraevykh ehffektov // Nano- i mikrosistemnaya tekhnika. 2016. T. 18. № 7. S. 424–431.
9. Dragunov V.P., Ostertak D. I. Ehlektrostaticheskie vzaimodejstviya v MEhMP so vstrechno-shtyrevoj strukturoj // Doklady Akademii nauk vysshej shkoly Rossijskoj Federatsii. 2009. № 1 (12). S. 99–106.
10. Dragunov V.P., Ostertak D. I. Ehlektrostaticheskie vzaimodejstviya v MEhMS s ploskoparallel'nymi ehlektrodami. chast' II. raschet ehlektrostaticheskikh sil // Nano- i mikrosistemnaya tekhnika. 2010. № 8. S. 40–47.
11. Hillenbrand J., Pondrom P., Sessler G. M. Electret transducer for vibration-based energy harvesting // Applied Physics Letters 106, 183902 (2015).
12. Pondrom P., Sessler G. M., Bӧs J., Melz T. Compact electret energy harvester with high power output // Applied Physics Letters 109, 053906 (2016).
13. Guilllemet R., Basset P., Galayko D., Cottone F., Marty F., Bourouina T. Wideband MEMS electrostatic vibration energy harvesters based on gap-closing interdigited combs with a trapezoidal section // Proceedings IEEE26th International Conference on MEMS. Taipei, 2013. P. 817–820. doi: 10.1109/MEMSYS.2013.6474368.
14. Ardito R., Baldasarre L., Corigliano A. On the numerical evaluation of capacitance and electrostatic forces in MEMS // 10th Int. Conf. on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, EuroSimE2009. P. 1–8. doi: https://doi.org/10.1109/ESIME.2009.4938495.
15. Dragunov V.P., Kiselyov D. E., Sinitskij R. E. Osobennosti ehlektromekhanicheskikh vzaimodejstvij v MEhMS s neparallel'nymi ehlektrodami // Nano- i mikrosistemnaya tekhnika. 2017. № 6. S. 360–369. doi: 10.17587/nmst.19.360–369.
16. Dragunov V.P., Sinitskij R. E., Kiselyov D. E. Vliyanie neparallel'nykh ehlektrodov na kharakteristiki MEhMS v rezhime s kontroliruemym zaryadom // Doklady Akademii nauk vysshej shkoly Rossijskoj Federatsii. 2017. № 1 (34). S. 58–71. doi: 10.17212/1727-2769-2017-1-58-71.
17. Dragunov V.P., Lyutaeva M. N. Parameters estimation of the MEM transducer with electrodes produced from different materials // 2009 International School and Seminar on Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies — Proceedings, INTERNANO. 2009. 5335625. P. 93–96.
18. Kuehne I., Frey A., Marinkovic D., Eckstein G., Seidel H. Power MEMS–A capacitive vibration-to-electrical energy converter with built-in voltage // Sensors and Actuators A 142 (2008) 263–269.
19. Varpula A., Laakso S. J., Havia T., Kyynäräinen J., Prunnila M. Contacting mode operation of work function energy harvester // Journal of Physics: Conference Series 557 (2014) 012010.