Features of the functioning of MEMS with an even number of electrodes

 
PIIS054412690002770-4-1
DOI10.31857/S054412690002770-4
Publication type Article
Status Published
Authors
Affiliation: Novosibirsk State Technical University
Address: Russian Federation
Affiliation: Novosibirsk State Technical University
Address: Russian Federation
Journal nameMikroelektronika
EditionVolume 47 6
Pages436-450
Abstract

  

Keywords
Received08.12.2018
Publication date08.12.2018
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