K.-H. Kwon
Korea University
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By this author
Title (en) | Readers community rating |
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Plasma parameters and kinetics of active particles in CF4 (CHF3) + Ar mixtures of variable initial composition (Mikroelektronika) | - |
Korea University
Title (en) | Readers community rating |
---|---|
Plasma parameters and kinetics of active particles in CF4 (CHF3) + Ar mixtures of variable initial composition (Mikroelektronika) | - |